Inventor · disambiguated record

Tim Provencher

Also filed as: PROVENCHER TIM

1 granted patent·1 pending application·20 citations·filing 2003–2003

40Inventor score

Technology areasH01J

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

2 records

0178US7182816B2Particulate reduction using temperature-controlled chamber shieldTOKYO ELECTRON LTD·Filed 2003·Granted Feb 27, 2007·20 cites·27 claims
0231US2004129221A1Cooled deposition baffle in high density plasma semiconductor processingFiled 2003·Application pending·0 cites

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