Inventor · disambiguated record
Diana Mattiza
Also filed as: MATTIZA DIANA
2 granted patents·5 citations·filing 2004–2004
48Inventor score
Technology areasG03F
Files withINFINEON TECHNOLOGIES AG2
Top patents by PatentIndex Score
2 records- 0143US7245351B2Alignment mark for coarse alignment and fine alignment of a semiconductor wafer in an exposure toolINFINEON TECHNOLOGIES AG·Filed 2004·Granted Jul 17, 2007·3 cites·12 claims
- 0243US6980304B2Method for measuring a characteristic dimension of at least one pattern on a disc-shaped object in a measuring instrumentINFINEON TECHNOLOGIES AG·Filed 2004·Granted Dec 27, 2005·2 cites·14 claims
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