Inventor · disambiguated record

Thomas Richard Harry

Also filed as: HARRY THOMAS R · HARRY THOMAS RICHARD

2 granted patents·157 citations·filing 1993–1995

70Inventor score

Technology areasH01J

Files withAT & T CORP1 LUCENT TECHNOLOGIES INC1

Top patents by PatentIndex Score

2 records

0193US5467883AActive neural network control of wafer attributes in a plasma etch processAT & T CORP·Filed 1993·Granted Nov 21, 1995·106 cites·20 claims
0284US5737496AActive neural network control of wafer attributes in a plasma etch processLUCENT TECHNOLOGIES INC·Filed 1995·Granted Apr 7, 1998·51 cites·3 claims

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