Inventor · disambiguated record
Robert Antaki
Also filed as: ANTAKI ROBERT
6 granted patents·1 pending application·151 citations·filing 2001–2005
85Inventor score
Files withDALSA SEMICONDUCTOR INC6
Top patents by PatentIndex Score
7 records- 0194US7160752B2Fabrication of advanced silicon-based MEMS devicesDALSA SEMICONDUCTOR INC·Filed 2005·Granted Jan 9, 2007·33 cites·23 claims
- 0288US6902656B2Fabrication of microstructures with vacuum-sealed cavityDALSA SEMICONDUCTOR INC·Filed 2002·Granted Jun 7, 2005·46 cites·29 claims
- 0387US7144750B2Method of fabricating silicon-based MEMS devicesDALSA SEMICONDUCTOR INC·Filed 2003·Granted Dec 5, 2006·44 cites·7 claims
- 0473US7459329B2Method of fabricating silicon-based MEMS devicesDALSA SEMICONDUCTOR INC·Filed 2005·Granted Dec 2, 2008·4 cites·16 claims
- 0562US6686214B2Method of aligning a photolithographic mask to a crystal planeDALSA SEMICONDUCTOR INC·Filed 2001·Granted Feb 3, 2004·17 cites·10 claims
- 0654US6770213B2Method of inspecting an anisotropic etch in a microstructureDALSA SEMICONDUCTOR INC·Filed 2001·Granted Aug 3, 2004·7 cites·18 claims
- 0740US2004157426A1Fabrication of advanced silicon-based MEMS devicesFiled 2003·Application pending·0 cites
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