Inventor · disambiguated record
Noriyuki Harashima
Also filed as: HARASHIMA NORIYUKI
6 granted patents·2 pending applications·53 citations·filing 1999–2006
81Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0171US6391791B1Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and methods for the fabrication thereofULVAC COATING CORP·Filed 1999·Granted May 21, 2002·33 cites·6 claims
- 0268US6881991B2Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereofMITSUBISHI ELECTRIC CORP·Filed 2002·Granted Apr 19, 2005·11 cites·2 claims
- 0351US6844117B2Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereofULVAC COATING CORP·Filed 2002·Granted Jan 18, 2005·3 cites·2 claims
- 0445US2006124245A1High selective ratio and high and uniform plasma processing method and systemKIKUCHI MASASHI·Filed 2006·Application pending·0 cites
- 0541US7063922B2Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereofMITSUBISHI ELECTRIC CORP·Filed 2003·Granted Jun 20, 2006·0 cites·4 claims
- 0641US7001698B2Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereofMITSUBISHI ELECTRIC CORP·Filed 2003·Granted Feb 21, 2006·0 cites·4 claims
- 0738US6685848B1Method and apparatus for dry-etching half-tone phase-shift films half-tone phase-shift photomasks and method for the preparation thereof and semiconductor circuits and method for the fabrication thereofULVAC COATING CORP·Filed 1999·Granted Feb 3, 2004·6 cites·11 claims
- 0838US2003183599A1High selective ratio and high and uniform plasma processing method and systemFiled 2003·Application pending·0 cites
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