Inventor · disambiguated record
Kenneth A. Hardy
Also filed as: HARDY KENNETH A · HARDY KENNETH ALAN
4 granted patents·661 citations·filing 1998–2003
81Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0192US6013920AWafer-mapping load post interface having an effector position sensing deviceFORTREND ENGINEERING COIRPORAT·Filed 1998·Granted Jan 11, 2000·611 cites·9 claims
- 0281US6396072B1Load port door assembly with integrated wafer mapperFORTREND ENGINEERING CORP·Filed 2000·Granted May 28, 2002·30 cites·27 claims
- 0354US7318697B2Universal reticle transfer systemFORTREND ENGINEERING CORP·Filed 2003·Granted Jan 15, 2008·8 cites·26 claims
- 0444US6610993B2Load port door assembly with integrated wafer mapperFORTREND ENGINEERING CORP·Filed 1999·Granted Aug 26, 2003·12 cites·22 claims
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