Inventor · disambiguated record

Richard Charles Taddiken

Also filed as: TADDIKEN RICHARD CHARLES

1 granted patent·4 citations·filing 2009–2009

25Inventor score

Technology areasH05G

Files withVASCHENKO GEORGIY O1

Top patents by PatentIndex Score

1 record

0150US8969838B2Systems and methods for protecting an EUV light source chamber from high pressure source material leaksVASCHENKO GEORGIY O·Filed 2009·Granted Mar 3, 2015·4 cites·20 claims

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