Inventor · disambiguated record

Wen-Bing Lin

Also filed as: LIN WEN-BING

1 granted patent·4 citations·filing 1999–1999

25Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG1

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1 record

0122US6153849AMethod and apparatus for preventing etch rate drop after machine idle in plasma etch chamberTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Nov 28, 2000·4 cites·25 claims

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