Inventor · disambiguated record

Keiichi Katabuchi

Also filed as: KATABUCHI KEIICHI

1 granted patent·19 citations·filing 2001–2001

44Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0178US7059849B2Heat treatment system and a method for cooling a loading chamberTOKYO ELECTRON LTD·Filed 2001·Granted Jun 13, 2006·19 cites·5 claims

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