Inventor · disambiguated record

Jumn-Min Fam

Also filed as: FAM JUMN-MIN

1 granted patent·0 citations·filing 1998–1998

8Inventor score

Technology areasC23C

Files withUNITED SILICON INC1

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1 record

0122US6099902AMethod of determining a time to clean a low pressure chemical vapor deposition (LPCVD) systemUNITED SILICON INC·Filed 1998·Granted Aug 8, 2000·0 cites·3 claims

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