Inventor · disambiguated record

Kenichirou Fukuda

Also filed as: FUKUDA KENICHIROU

1 granted patent·147 citations·filing 1994–1994

55Inventor score

Technology areasG03F

Files withHITACHI LTD1

Top patents by PatentIndex Score

1 record

0195US5677755AMethod and apparatus for pattern exposure, mask used therefor, and semiconductor integrated circuit produced by using themHITACHI LTD·Filed 1994·Granted Oct 14, 1997·147 cites·39 claims

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