Inventor · disambiguated record
Terry A. Breeden
Also filed as: BREEDEN TERRY · BREEDEN TERRY A · BREEDEN TERRY ALAN
4 granted patents·14 citations·filing 2001–2011
69Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0173US7951695B2Method for reducing plasma discharge damage during processingFREESCALE SEMICONDUCTOR INC·Filed 2008·Granted May 31, 2011·4 cites·18 claims
- 0255US6663674B2Method of handling a silicon waferINFINEON TECHNOLOGIES SC300·Filed 2002·Granted Dec 16, 2003·8 cites·7 claims
- 0348US8343842B2Method for reducing plasma discharge damage during processingFREESCALE SEMICONDUCTOR INC·Filed 2011·Granted Jan 1, 2013·0 cites·6 claims
- 0442US6362098B1Plasma-enhanced chemical vapor deposition (CVD) method to fill a trench in a semiconductor substrateMOTOROLA INC·Filed 2001·Granted Mar 26, 2002·2 cites·12 claims
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