Inventor · disambiguated record

Yuzo Oka

Also filed as: OKA YUZO

1 granted patent·32 citations·filing 1987–1987

45Inventor score

Technology areasC23C

Files withHITACHI LTD1

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1 record

0171US4759948AFilm formation through co-deposition with high and low energy beamsHITACHI LTD·Filed 1987·Granted Jul 26, 1988·32 cites·15 claims

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