Inventor · disambiguated record
Osamu Iizuka
Also filed as: IIZUKA OSAMU
21 granted patents·1 pending application·30 citations·filing 2006–2024
91Inventor score
Top patents by PatentIndex Score
22 records- 0185US10109458B2Multi charged-particle beam writing apparatus and adjustment method for the sameNUFLARE TECHNOLOGY INC·Filed 2017·Granted Oct 23, 2018·3 cites·10 claims
- 0282US9966228B2Multi charged particle beam apparatus, and shape adjustment method of multi charged particle beam imageNUFLARE TECHNOLOGY INC·Filed 2016·Granted May 8, 2018·3 cites·10 claims
- 0382US9466461B2Rotation angle measuring method of multi-charged particle beam image, rotation angle adjustment method of multi-charged particle beam image, and multi-charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2015·Granted Oct 11, 2016·3 cites·10 claims
- 0482US8362450B2Electron beam drift correction method and electron beam writing methodNUFLARE TECHNOLOGY INC·Filed 2006·Granted Jan 29, 2013·9 cites·16 claims
- 0577US10867774B2Multi charged particle beam writing apparatus and multi charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2018·Granted Dec 15, 2020·2 cites·4 claims
- 0676US10388488B2Multi charged particle beam drawing apparatus and multi charged particle beam drawing methodNUFLARE TECHNOLOGY INC·Filed 2018·Granted Aug 20, 2019·2 cites·9 claims
- 0770US10504696B2Multi charged particle beam writing apparatus and multi charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2017·Granted Dec 10, 2019·1 cites·18 claims
- 0870US10483088B2Multi charged particle beam writing apparatus and multi charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2017·Granted Nov 19, 2019·1 cites·14 claims
- 0968US11024485B2Multi-charged-particle-beam writing apparatus and beam evaluating method for the sameNUFLARE TECHNOLOGY INC·Filed 2019·Granted Jun 1, 2021·1 cites·8 claims
- 1066US9653262B2Method of measuring beam position of multi charged particle beam, and multi charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2015·Granted May 16, 2017·1 cites·10 claims
- 1163US8008631B2Method of acquiring offset deflection amount for shaped beam and lithography apparatusNUFLARE TECHNOLOGY INC·Filed 2009·Granted Aug 30, 2011·1 cites·10 claims
- 1260US2025054727A1Beam position measurement method and charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2024·Application pending·0 cites
- 1358US9236154B2Charged-particle beam drawing method, computer-readable recording media, and charged-particle beam drawing apparatusNUFLARE TECHNOLOGY INC·Filed 2013·Granted Jan 12, 2016·1 cites·6 claims
- 1458US8188443B2Focusing method of charged particle beam and astigmatism adjusting method of charged particleOHTOSHI KENJI·Filed 2008·Granted May 29, 2012·2 cites·8 claims
- 1549US11127566B2Multi charged particle beam writing apparatus and multi charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2020·Granted Sep 21, 2021·0 cites·12 claims
- 1649US10636616B2Aperture array alignment method and multi charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2018·Granted Apr 28, 2020·0 cites·13 claims
- 1747US9536705B2Method for correcting drift of charged particle beam, and charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2015·Granted Jan 3, 2017·0 cites·10 claims
- 1845US10458477B2Seal for rolling bearing and rolling bearingMINEBEA MITSUMI INC·Filed 2018·Granted Oct 29, 2019·0 cites·10 claims
- 1945US8253112B2Lithography apparatus and focusing method for charged particle beamIIZUKA OSAMU·Filed 2009·Granted Aug 28, 2012·0 cites·10 claims
- 2043US11037759B2Multi charged particle beam writing apparatus and multi charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2018·Granted Jun 15, 2021·0 cites·13 claims
- 2141US10497539B2Multi charged particle beam writing apparatus and multi charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2017·Granted Dec 3, 2019·0 cites·18 claims
- 2238US9460892B2Charged particle beam writing method, computer-readable recording medium, and charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2013·Granted Oct 4, 2016·0 cites·15 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →