Inventor · disambiguated record

David Fatke

Also filed as: FATKE DAVID

2 granted patents·51 citations·filing 2002–2004

63Inventor score

Technology areasG05B H10P

Files withTOKYO ELECTRON LTD2

Top patents by PatentIndex Score

2 records

0183US7213478B2Method for automatic configuration of processing systemTOKYO ELECTRON LTD·Filed 2004·Granted May 8, 2007·41 cites·36 claims
0262US7297287B2Method and apparatus for endpoint detection using partial least squaresTOKYO ELECTRON LTD·Filed 2002·Granted Nov 20, 2007·10 cites·26 claims

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