Inventor · disambiguated record

Nico Kemper

Also filed as: KEMPER NICO

1 granted patent·2 citations·filing 2005–2005

18Inventor score

Technology areasG03F

Files withZEISS CARL SMT AG1

Top patents by PatentIndex Score

1 record

0161US7692881B2Structure for use in a projection exposure system for manufacturing semiconductorsZEISS CARL SMT AG·Filed 2005·Granted Apr 6, 2010·2 cites·18 claims

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