Inventor · disambiguated record
Pavel Stanislavovich Antsiferov
Also filed as: ANTSIFEROV PAVEL · ANTSIFEROV PAVEL S · ANTSIFEROV PAVEL STANISLAVOVIC · ANTSIFEROV PAVEL STANISLAVOVICH
10 granted patents·2 pending applications·88 citations·filing 2003–2016
88Inventor score
Files withASML NETHERLANDS BV5AKDIM MOHAMED REDA2ANTSIFEROV PAVEL STANISLAVOVICH1FMC TECH INC1ISTEQ B V1
Top patents by PatentIndex Score
12 records- 0195US8921814B2Photon source, metrology apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Dec 30, 2014·28 cites·20 claims
- 0294US9476841B1High-brightness LPP EUV light sourceISTEQ B V·Filed 2016·Granted Oct 25, 2016·22 cites·17 claims
- 0388US9357626B2Photon source, metrology apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted May 31, 2016·7 cites·20 claims
- 0479US9440241B2Electrostatic coalescer with resonance tracking circuitAKDIM MOHAMED REDA·Filed 2009·Granted Sep 13, 2016·8 cites·25 claims
- 0573US6933510B2Radiation source, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Aug 23, 2005·16 cites·25 claims
- 0665US9357627B2Light source with laser pumping and method for generating radiationANTSIFEROV PAVEL STANISLAVOVICH·Filed 2014·Granted May 31, 2016·2 cites·20 claims
- 0764US9321055B2Gas electrostatic coalescerAKDIM MOHAMED REDA·Filed 2009·Granted Apr 26, 2016·3 cites·23 claims
- 0862US9368337B2Light source with laser pumping and method for generating radiationRND IS AN LTD·Filed 2013·Granted Jun 14, 2016·2 cites·18 claims
- 0958US9962712B2Separating primarily gas process fluids in an electrostatic coalescerFMC TECH INC·Filed 2016·Granted May 8, 2018·0 cites·19 claims
- 1035US7872244B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Jan 18, 2011·0 cites·36 claims
- 1135US2005253092A1Radiation source, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Application pending·0 cites
- 1231US2013070218A1System for removing contaminant particles, lithographic apparatus, method for removing contaminant particles and method for manufacturing a deviceIVANOV VLADIMIR VITALEVICH·Filed 2011·Application pending·0 cites
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