Inventor · disambiguated record
Keung Hui
Also filed as: HUI KEUNG
11 granted patents·1 pending application·52 citations·filing 2003–2015
88Inventor score
Top patents by PatentIndex Score
12 records- 0192US8295965B2Semiconductor processing dispatch controlWU SUNNY·Filed 2010·Granted Oct 23, 2012·15 cites·7 claims
- 0288US9102033B2Apparatus and method for target thickness and surface profile uniformity control of multi-head chemical mechanical polishing processHUI KEUNG·Filed 2010·Granted Aug 11, 2015·11 cites·20 claims
- 0387US8309444B2System and method of dosage profile controlHUI KEUNG·Filed 2010·Granted Nov 13, 2012·8 cites·16 claims
- 0483US9158301B2Semiconductor processing dispatch controlTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Oct 13, 2015·4 cites·20 claims
- 0582US10096482B2Apparatus and method for chemical mechanical polishing process controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Oct 9, 2018·3 cites·20 claims
- 0682US9132523B2Chemical mechanical polish process control for improvement in within-wafer thickness uniformityLEE SHEN-NAN·Filed 2012·Granted Sep 15, 2015·5 cites·20 claims
- 0774US8781614B2Semiconductor processing dispatch controlWU SUNNY·Filed 2012·Granted Jul 15, 2014·2 cites·18 claims
- 0871US8129279B2Chemical mechanical polish process control for improvement in within-wafer thickness uniformityLEE SHEN-NAN·Filed 2008·Granted Mar 6, 2012·4 cites·22 claims
- 0957US2004148212A1Method and apparatus for measuring optimality for master production schedulesTAIWAN SEMICONDUCTOR MFG·Filed 2003·Application pending·0 cites
- 1054US8925479B2System and method of dosage profile controlTAIWAN SEMICONDUCTOR MFG·Filed 2012·Granted Jan 6, 2015·0 cites·20 claims
- 1138US9323244B2Semiconductor fabrication component retuningTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Apr 26, 2016·0 cites·20 claims
- 1236US8294124B2Scanning method and system using 2-D ion implanterHUI KEUNG·Filed 2010·Granted Oct 23, 2012·0 cites·7 claims
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