Inventor · disambiguated record
Heinz-Dieter Petermann
Also filed as: PETERMANN HEINZ-DIETER
2 granted patents·24 citations·filing 1999–2001
61Inventor score
Files withINFINEON TECHNOLOGIES AG2
Top patents by PatentIndex Score
2 records- 0163US6436281B2Apparatus for treating wastewater from a chemical-mechanical polishing process used in chip fabricationINFINEON TECHNOLOGIES AG·Filed 2001·Granted Aug 20, 2002·11 cites·4 claims
- 0246US6506306B1Method and an apparatus for treating wastewater from a chemical-mechanical polishing process used in chip fabricationINFINEON TECHNOLOGIES AG·Filed 1999·Granted Jan 14, 2003·13 cites·4 claims
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