Inventor · disambiguated record

Ching-Fa Chen

Also filed as: CHEN CHING-FA

1 granted patent·3 citations·filing 2013–2013

20Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG CO LTD1

Top patents by PatentIndex Score

1 record

0164US9691640B2Mechanisms for cleaning load ports of semiconductor process toolsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jun 27, 2017·3 cites·20 claims

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