Inventor · disambiguated record
Christopher Gage
Also filed as: GAGE CHRISTOPHER · GAGE CHRISTOPHER ARNELL SURTEE
5 granted patents·5 pending applications·1,181 citations·filing 1997–2023
87Inventor score
Top patents by PatentIndex Score
10 records- 0197US8033771B1Minimum contact area wafer clamping with gas flow for rapid wafer coolingNOVELLUS SYSTEMS INC·Filed 2008·Granted Oct 11, 2011·501 cites·28 claims
- 0297US6023270ADelivery of objects in a virtual world using a descriptive containerIBM·Filed 1997·Granted Feb 8, 2000·588 cites·45 claims
- 0392US8288288B1Transferring heat in loadlocksGAGE CHRISTOPHER·Filed 2008·Granted Oct 16, 2012·32 cites·18 claims
- 0490US8100081B1Edge removal of films using externally generated plasma speciesHENRI JON·Filed 2006·Granted Jan 24, 2012·48 cites·17 claims
- 0589US8454294B2Minimum contact area wafer clamping with gas flow for rapid wafer coolingGAGE CHRISTOPHER·Filed 2011·Granted Jun 4, 2013·12 cites·20 claims
- 0659US2024200191A1Backside deposition prevention on substratesLAM RES CORP·Filed 2022·Application pending·0 cites
- 0756US2025167025A1Apparatus and methods for reducing wafer backside damageLAM RES CORP·Filed 2023·Application pending·0 cites
- 0855US2023073259A1High temperature substrate support with heat spreaderLAM RES CORP·Filed 2021·Application pending·0 cites
- 0949US2023416918A1Pedestal including sealLAM RES CORP·Filed 2021·Application pending·0 cites
- 1044US2021398829A1Ceramic pedestal with multi-layer heater for enhanced thermal uniformityLAM RES CORP·Filed 2019·Application pending·0 cites
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