Inventor · disambiguated record
Oliver Kirch
Also filed as: KIRCH OLIVER
2 granted patents·1 pending application·7 citations·filing 2003–2009
47Inventor score
Top patents by PatentIndex Score
3 records- 0150US6890699B2Polymer material having a low glass transition temperature for use in chemically amplified photoresists for semiconductor productionINFINEON TECHNOLOGIES AG·Filed 2003·Granted May 10, 2005·7 cites·12 claims
- 0243US7915599B2Radiation transducer and method to produce a radiation transducerSIEMENS AG·Filed 2009·Granted Mar 29, 2011·0 cites·9 claims
- 0330US2006083993A1Process for the production of photomasks for structuring semiconductor substrates by optical lithographyKIRCH OLIVER·Filed 2003·Application pending·0 cites
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