Inventor · disambiguated record

Ralf Frese

Also filed as: FRESE RALF

1 granted patent·5 citations·filing 2014–2014

26Inventor score

Technology areasG03F

Files withZEISS CARL SMT GMBH1

Top patents by PatentIndex Score

1 record

0184US9494483B2Measuring system for measuring an imaging quality of an EUV lensZEISS CARL SMT GMBH·Filed 2014·Granted Nov 15, 2016·5 cites·24 claims

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