Inventor · disambiguated record
Mitsuru Funakura
Also filed as: FUNAKURA MITSURU
2 granted patents·1 pending application·8 citations·filing 2007–2023
50Inventor score
Top patents by PatentIndex Score
3 records- 0180US9960065B2Substrate processing apparatus for managing transfer state of substrate gas storage container based on supply flow rateHITACHI INT ELECTRIC INC·Filed 2014·Granted May 1, 2018·7 cites·11 claims
- 0249US2023238263A1Method of displaying substrate arrangement data, method of manufacturing semiconductor device, non-transitory computer-readable recording mendium and substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 0334US8806370B2Substrate processing apparatusNOGAMI SHIGEKI·Filed 2007·Granted Aug 12, 2014·1 cites·8 claims
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