Inventor · disambiguated record
Darryl Barlett
Also filed as: BARLETT DARRYL
6 granted patents·2 pending applications·38 citations·filing 2004–2012
79Inventor score
Top patents by PatentIndex Score
8 records- 0181US7837383B2Apparatus and method for real time measurement of substrate temperatures for use in semiconductor growth and wafer processingSPACE ASSOCIATES INC K·Filed 2008·Granted Nov 23, 2010·10 cites·7 claims
- 0279US8786841B2Thin film temperature measurement using optical absorption edge wavelengthBARLETT DARRYL·Filed 2010·Granted Jul 22, 2014·6 cites·22 claims
- 0378US9239265B2Apparatus and method for real time measurement of substrate temperatures for use in semiconductor growth and wafer processingTAYLOR II CHARLES A·Filed 2010·Granted Jan 19, 2016·5 cites·9 claims
- 0469US7391523B1Curvature/tilt metrology tool with closed loop feedback controlSPACE ASSOCIATES INC K·Filed 2004·Granted Jun 24, 2008·17 cites·16 claims
- 0541US2005106876A1Apparatus and method for real time measurement of substrate temperatures for use in semiconductor growth and wafer processingFiled 2004·Application pending·0 cites
- 0640US9030652B2Non-contact, optical sensor for synchronizing to free rotating sample platens with asymmetrySPACE ASSOCIATES INC K·Filed 2012·Granted May 12, 2015·0 cites·11 claims
- 0738US2013321805A1Real-time temperature, optical band gap, film thickness, and surface roughness measurement for thin films applied to transparent substratesBARLETT DARRYL·Filed 2011·Application pending·0 cites
- 0835US8282273B2Blackbody fitting for temperature determinationBARLETT DARRYL·Filed 2010·Granted Oct 9, 2012·0 cites·20 claims
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