Inventor · disambiguated record
Stefan Hirscher
Also filed as: HIRSCHER STEFAN
2 granted patents·22 citations·filing 2004–2006
61Inventor score
Technology areasB82Y
Files withINFINEON TECHNOLOGIES AG2
Top patents by PatentIndex Score
2 records- 0184US7376512B2Method for determining an optimal absorber stack geometry of a lithographic reflection maskINFINEON TECHNOLOGIES AG·Filed 2006·Granted May 20, 2008·13 cites·18 claims
- 0260US7094507B2Method for determining an optimal absorber stack geometry of a lithographic reflection maskINFINEON TECHNOLOGIES AG·Filed 2004·Granted Aug 22, 2006·9 cites·7 claims
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