Inventor · disambiguated record

Adrian Bürli

Also filed as: BUERLI ADRIAN

2 granted patents·95 citations·filing 2009–2009

67Inventor score

Technology areasH01J Y10S

Files withFRAGNER HEINRICH2

Top patents by PatentIndex Score

2 records

0194US8222621B2Method for maskless particle-beam exposureFRAGNER HEINRICH·Filed 2009·Granted Jul 17, 2012·70 cites·9 claims
0281US8057972B2Constant current multi-beam patterningFRAGNER HEINRICH·Filed 2009·Granted Nov 15, 2011·25 cites·9 claims

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