Inventor · disambiguated record
Minoru Onda
Also filed as: ONDA MINORU
3 granted patents·4 pending applications·139 citations·filing 1998–2016
73Inventor score
Technology areasG03F
Top patents by PatentIndex Score
7 records- 0190US6235438B1Projection exposure method and apparatusNIKON CORP·Filed 1998·Granted May 22, 2001·96 cites·91 claims
- 0289US6522390B2Projection exposure method and apparatusNIKON CORP·Filed 2001·Granted Feb 18, 2003·43 cites·28 claims
- 0358US9411247B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2013·Granted Aug 9, 2016·0 cites·29 claims
- 0453US2016363870A1Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2016·Application pending·0 cites
- 0548US2008068567A1Exposure Apparatus, Exposure Method, and Method for Producing DeviceNAGASAKA HIROYUKI·Filed 2005·Application pending·0 cites
- 0642US2013169944A1Exposure apparatus, exposure method, device manufacturing method, program, and recording mediumNIKON CORP·Filed 2012·Application pending·0 cites
- 0742US2007222959A1Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2007·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →