Inventor · disambiguated record
Chuan-Kai Lo
Also filed as: LO CHUAN-KAI
2 granted patents·50 citations·filing 2000–2002
65Inventor score
Technology areasH10P
Files withLAM RES CORP2
Top patents by PatentIndex Score
2 records- 0178US6486070B1Ultra-high oxide to photoresist selective etch of high-aspect-ratio openings in a low-pressure, high-density plasmaLAM RES CORP·Filed 2000·Granted Nov 26, 2002·26 cites·15 claims
- 0277US6559049B2All dual damascene oxide etch process steps in one confined plasma chamberLAM RES CORP·Filed 2002·Granted May 6, 2003·24 cites·18 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →