Inventor · disambiguated record
Kazushige Shiina
Also filed as: SHIINA KAZUSHIGE
4 granted patents·1 pending application·38 citations·filing 1991–2018
72Inventor score
Files withOHORI TATSUYA2E E TECHNOLOGIES INC1FUJITSU LTD1NATIONAL UNIV CORPORATION TOKYO UNIV OF AGRICULTURE AND TECHNOLOGY1
Top patents by PatentIndex Score
5 records- 0168US8277893B2Chemical vapor deposition apparatusOHORI TATSUYA·Filed 2009·Granted Oct 2, 2012·2 cites·20 claims
- 0267US6837940B2Film-forming device with a substrate rotating mechanismE E TECHNOLOGIES INC·Filed 2001·Granted Jan 4, 2005·19 cites·14 claims
- 0353US5833754ADeposition apparatus for growing a material with reduced hazardFUJITSU LTD·Filed 1991·Granted Nov 10, 1998·17 cites·6 claims
- 0450US2007051316A1Chemical vapor deposition apparatusOHORI TATSUYA·Filed 2006·Application pending·0 cites
- 0540US11499247B2Vapor-liquid reaction device, reaction tube, film forming apparatusNATIONAL UNIV CORPORATION TOKYO UNIV OF AGRICULTURE AND TECHNOLOGY·Filed 2018·Granted Nov 15, 2022·0 cites·20 claims
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