Inventor · disambiguated record

Yuhei Shimatsu

Also filed as: SHIMATSU YUHEI

1 granted patent·0 citations·filing 2022–2022

8Inventor score

Technology areasH01J

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0158US11735402B2Measurement method and measurement apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Aug 22, 2023·0 cites·13 claims

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