Inventor · disambiguated record
Alan D. Rose
Also filed as: ROSE ALAN D · ROSE ALAN DEE
18 granted patents·3 pending applications·1,018 citations·filing 1987–2021
95Inventor score
Top patents by PatentIndex Score
21 records- 0198US5423942AMethod and apparatus for reducing etching erosion in a plasma containment tubeTEXAS INSTRUMENTS INC·Filed 1994·Granted Jun 13, 1995·493 cites·20 claims
- 0297US4792378AGas dispersion disk for use in plasma enhanced chemical vapor deposition reactorTEXAS INSTRUMENTS INC·Filed 1987·Granted Dec 20, 1988·354 cites·22 claims
- 0395US4820371AApertured ring for exhausting plasma reactor gasesTEXAS INSTRUMENTS INC·Filed 1987·Granted Apr 11, 1989·84 cites·18 claims
- 0492US8387635B2Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluidsCOLLINS JIMMY D·Filed 2007·Granted Mar 5, 2013·18 cites·18 claims
- 0591US8235062B2Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operationLAUERHAAS JEFFREY M·Filed 2009·Granted Aug 7, 2012·18 cites·17 claims
- 0687US7913706B2Rinsing methodologies for barrier plate and venturi containment systems in tools used to process microelectronic workpieces with one or more treatment fluids, and related apparatusesFSI INT INC·Filed 2008·Granted Mar 29, 2011·14 cites·10 claims
- 0786US7681581B2Compact duct system incorporating moveable and nestable baffles for use in tools used to process microelectronic workpieces with one or more treatment fluidsFSI INT INC·Filed 2006·Granted Mar 23, 2010·14 cites·24 claims
- 0884US9564378B2Detection of lost wafer from spinning chuckTEL FSI INC·Filed 2014·Granted Feb 7, 2017·7 cites·13 claims
- 0980US9666456B2Method and apparatus for treating a workpiece with arrays of nozzlesTEL FSI INC·Filed 2015·Granted May 30, 2017·2 cites·11 claims
- 1079US8684015B2Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operationLAUERHAAS JEFFREY M·Filed 2012·Granted Apr 1, 2014·4 cites·9 claims
- 1177US8899248B2Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluidsCOLLINS JIMMY D·Filed 2011·Granted Dec 2, 2014·3 cites·17 claims
- 1275US8544483B2Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluidsCOLLINS JIMMY D·Filed 2006·Granted Oct 1, 2013·4 cites·30 claims
- 1372US8656936B2Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluidsCOLLINS JIMMY D·Filed 2008·Granted Feb 25, 2014·3 cites·9 claims
- 1463US2022088647A1System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid spraysTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2021·Application pending·0 cites
- 1557US11207715B2System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid spraysTEL FSI INC·Filed 2019·Granted Dec 28, 2021·0 cites·21 claims
- 1657US2015075569A1Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluidsTEL FSI INC·Filed 2014·Application pending·0 cites
- 1756US8967167B2Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluidsFSI INT INC·Filed 2012·Granted Mar 3, 2015·0 cites·10 claims
- 1856US8668778B2Method of removing liquid from a barrier structureFSI INT INC·Filed 2012·Granted Mar 11, 2014·0 cites·13 claims
- 1955US9039840B2Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operationTEL FSI INC·Filed 2013·Granted May 26, 2015·0 cites·5 claims
- 2055US8978675B2Method and apparatus for treating a workpiece with arrays of nozzlesFSI INT INC·Filed 2012·Granted Mar 17, 2015·0 cites·9 claims
- 2139US2018190517A1Recipe selectable dispense system and method of operatingTEL FSI INC·Filed 2017·Application pending·0 cites
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