Inventor · disambiguated record
Wen-Tsung Wu
Also filed as: WU WEN-TSUNG
2 granted patents·1 pending application·6 citations·filing 2007–2008
44Inventor score
Technology areasG03F
Top patents by PatentIndex Score
3 records- 0172US7871745B2Exposure methodUNITED MICROELECTRONICS CORP·Filed 2007·Granted Jan 18, 2011·6 cites·11 claims
- 0233US2009191723A1Method of performing lithographic processesHUANG CHI-CHING·Filed 2008·Application pending·0 cites
- 0330US7669171B2Prediction model and prediction method for exposure doseUNITED MICEOELECTRONICS CORP·Filed 2007·Granted Feb 23, 2010·0 cites·11 claims
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