Inventor · disambiguated record
Christian Rotsch
Also filed as: ROTSCH CHRISTIAN
6 granted patents·16 citations·filing 2001–2016
76Inventor score
Top patents by PatentIndex Score
6 records- 0168US7307715B2Method for the formation of a structure size measured valueINFINEON TECHNOLOGIES AG·Filed 2005·Granted Dec 11, 2007·3 cites·23 claims
- 0259US6628409B2Method for determining the distance between periodic structures on an integrated circuit or a photomaskINFINEON TECHNOLOGIES AG·Filed 2001·Granted Sep 30, 2003·4 cites·5 claims
- 0353US7385676B2Mask set having separate masks to form different regions of integrated circuit chips, exposure system including the mask set with an aperture device, and method of using the mask set to expose a semiconductor waferINFINEON TECHNOLOGIES AG·Filed 2004·Granted Jun 10, 2008·4 cites·29 claims
- 0448US7124379B2Method for communicating a measuring position of a structural element that is to be formed on a maskINFINEON TECHNOLOGIES AG·Filed 2003·Granted Oct 17, 2006·4 cites·19 claims
- 0539US11446767B2Composite body having at least one functional component, and a method of producing said composite bodyFRAUNHOFER GES FORSCHUNG·Filed 2016·Granted Sep 20, 2022·0 cites·20 claims
- 0630US6552331B2Device and method for combining scanning and imaging methods in checking photomasksINFINEON TECHNOLOGIES AG·Filed 2001·Granted Apr 22, 2003·1 cites·27 claims
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