Inventor · disambiguated record
Sergey Oshemkov
Also filed as: OSHEMKOV SERGEY · OSHEMKOV SERGEY V · OSHEMKOV SERGEY VIKTOROVICH
12 granted patents·5 pending applications·89 citations·filing 2000–2025
89Inventor score
Top patents by PatentIndex Score
17 records- 0184US10670955B2Critical dimension variation correction in extreme ultraviolet lithographyZEISS CARL SMT GMBH·Filed 2018·Granted Jun 2, 2020·3 cites·5 claims
- 0277US10095101B2Critical dimension variation correction in extreme ultraviolet lithographyZEISS CARL SMT GMBH·Filed 2016·Granted Oct 9, 2018·2 cites·12 claims
- 0376US6873444B1Volume holograms in transparent materialsU C LASER LTD·Filed 2000·Granted Mar 29, 2005·22 cites·8 claims
- 0471US7459242B2Method and system for repairing defected photomasksPIXER TECHNOLOGY LTD·Filed 2002·Granted Dec 2, 2008·15 cites·9 claims
- 0570US6566626B2Method and apparatus for generating color images in a transparent mediumLASERGLASS LTD·Filed 2001·Granted May 20, 2003·20 cites·49 claims
- 0668US11774870B2Method for removing a particle from a mask systemZEISS CARL SMT GMBH·Filed 2022·Granted Oct 3, 2023·0 cites·24 claims
- 0766US7736819B2Method for correcting critical dimension variations in photomasksPIXER TECHNOLOGY LTD·Filed 2004·Granted Jun 15, 2010·10 cites·12 claims
- 0866US2024402591A1Ml reflectivity modificationZEISS CARL SMS LTD·Filed 2024·Application pending·0 cites
- 0964US9034539B2Controllable transmission and phase compensation of transparent materialOSHEMKOV SERGEY·Filed 2011·Granted May 19, 2015·2 cites·26 claims
- 1064US2025237960A1Methods, computer programs and apparatuses for treating an optical element for the extreme ultraviolet wavelength rangeZEISS CARL SMS LTD·Filed 2025·Application pending·0 cites
- 1163US6884961B1Intravolume diffractive optical elementsUC LASER LTD·Filed 2001·Granted Apr 26, 2005·12 cites·23 claims
- 1261US2025385095A1Wafer conditioningZEISS CARL SMS LTD·Filed 2025·Application pending·0 cites
- 1360US8101921B2Apparatus and method for inducing controllable jets in liquidsOSHEMKOV SERGEY·Filed 2008·Granted Jan 24, 2012·3 cites·21 claims
- 1448US9690191B2Surface defect repair by irradiationZEISS CARL SMS LTD·Filed 2014·Granted Jun 27, 2017·0 cites·22 claims
- 1546US2011036991A1Method for creating, trapping and manipulating a gas bubble in liquidPIXER TECHNOLOGY LTD·Filed 2009·Application pending·0 cites
- 1645US8735030B2Method and apparatus for modifying a substrate surface of a photolithographic maskOSHEMKOV SERGEY·Filed 2011·Granted May 27, 2014·0 cites·12 claims
- 1738US2008165406A1Subsurface ReticleGALUN EHUD·Filed 2006·Application pending·0 cites
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