Inventor · disambiguated record

Anne Marie Pastol

Also filed as: PASTOL ANNE MARIE

1 granted patent·2 citations·filing 2019–2019

19Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0178US11294294B2Alignment mark positioning in a lithographic processASML NETHERLANDS BV·Filed 2019·Granted Apr 5, 2022·2 cites·20 claims

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