Inventor · disambiguated record
Bryan Pennington
Also filed as: PENNINGTON BRYAN
5 granted patents·83 citations·filing 2008–2019
76Inventor score
Top patents by PatentIndex Score
5 records- 0193US8308931B2Method and apparatus for electroplatingREID JONATHAN·Filed 2008·Granted Nov 13, 2012·62 cites·34 claims
- 0291US8500983B2Pulse sequence for plating on thin seed layersPONNUSWAMY THOMAS A·Filed 2010·Granted Aug 6, 2013·20 cites·14 claims
- 0381US10443146B2Monitoring surface oxide on seed layers during electroplatingLAM RES CORP·Filed 2017·Granted Oct 15, 2019·1 cites·14 claims
- 0471US11208732B2Monitoring surface oxide on seed layers during electroplatingLAM RES CORP·Filed 2019·Granted Dec 28, 2021·0 cites·8 claims
- 0542US10358738B2Gap fill process stability monitoring of an electroplating process using a potential-controlled exit stepLAM RES CORP·Filed 2016·Granted Jul 23, 2019·0 cites·18 claims
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