Inventor · disambiguated record
Hoonsang Choi
Also filed as: CHOI HOONSANG
1 granted patent·1 pending application·0 citations·filing 2008–2011
11Inventor score
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2 records- 0136US8105930B2Method of forming dielectric including dysprosium and scandium by atomic layer deposition and integrated circuit device including the dielectric layerCHOI HOONSANG·Filed 2008·Granted Jan 31, 2012·0 cites·23 claims
- 0226US2012145080A1Substrate support unit, and apparatus and method for depositing thin layer using the samePARK YOUNGKYOU·Filed 2011·Application pending·0 cites
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