Inventor · disambiguated record
Shane Glynn
Also filed as: GLYNN SHANE
2 granted patents·1 pending application·17 citations·filing 2008–2011
58Inventor score
Top patents by PatentIndex Score
3 records- 0185US9842726B2Method and apparatus for the detection of arc events during the plasma processing of a wafer, surface of substrateDANIELS STEPHEN·Filed 2010·Granted Dec 12, 2017·13 cites·27 claims
- 0269US8945467B2Method and apparatus for the sterilisation of articlesSOBERON FELIPE·Filed 2011·Granted Feb 3, 2015·4 cites·19 claims
- 0344US2010216263A1Method and Apparatus for Measuring Process Parameters of a Plasma Etch ProcessLEXAS RES LTD·Filed 2008·Application pending·0 cites
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