Inventor · disambiguated record

Rainer Kaebsch

Also filed as: KAEBSCH RAINER

1 granted patent·7 citations·filing 2001–2001

29Inventor score

Technology areasH01J

Files withLEICA MICROSYS LITHOGRAPHY LTD1

Top patents by PatentIndex Score

1 record

0157US6635884B2Method for directing an electron beam onto a target position on a substrate surfaceLEICA MICROSYS LITHOGRAPHY LTD·Filed 2001·Granted Oct 21, 2003·7 cites·6 claims

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