Inventor · disambiguated record
Vera Lemmen
Also filed as: LEMMEN VERA
2 granted patents·17 citations·filing 2003–2003
58Inventor score
Technology areasG03F
Top patents by PatentIndex Score
2 records- 0162US7084952B2Lithographic apparatus, device manufacturing method, and computer-readable storage mediumASML NETHERLANDS BV·Filed 2003·Granted Aug 1, 2006·8 cites·38 claims
- 0258US6788383B1Lithographic apparatus, device manufacturing methods, and computer-readable storage mediumASML NETHERLANDS BVV·Filed 2003·Granted Sep 7, 2004·9 cites·18 claims
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