Inventor · disambiguated record

Satoro Sanada

Also filed as: SANADA SATORO

1 granted patent·6 citations·filing 2010–2010

27Inventor score

Technology areasH10P

Files withTANAKA YASUAKI1

Top patents by PatentIndex Score

1 record

0173US8964190B2Alignment apparatus, substrates stacking apparatus, stacked substrates manufacturing apparatus, exposure apparatus and alignment methodTANAKA YASUAKI·Filed 2010·Granted Feb 24, 2015·6 cites·47 claims

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