Inventor · disambiguated record

Sebastian Ulrich Englemann

Also filed as: ENGLEMANN SEBASTIAN ULRICH

1 granted patent·5 citations·filing 2019–2019

26Inventor score

Technology areasH01L

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0184US11258012B2Oxygen-free plasma etching for contact etching of resistive random access memoryTOKYO ELECTRON LTD·Filed 2019·Granted Feb 22, 2022·5 cites·20 claims

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