Inventor · disambiguated record

Mari Shigeta

Also filed as: SHIGETA Mari

2 granted patents·1 citations·filing 2014–2015

31Inventor score

Technology areasH10P

Files withMITSUBISHI GAS CHEMICAL CO2

Top patents by PatentIndex Score

2 records

0156US10023797B2Liquid composition for etching oxides comprising indium, zinc, tin, and oxygen and etching methodMITSUBISHI GAS CHEMICAL CO·Filed 2015·Granted Jul 17, 2018·1 cites·9 claims
0245US9824899B2Etching liquid for oxide containing zinc and tin, and etching methodMITSUBISHI GAS CHEMICAL CO·Filed 2014·Granted Nov 21, 2017·0 cites·11 claims

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