Inventor · disambiguated record
Kumiko Oguni
Also filed as: OGUNI KUMIKO
4 granted patents·24 citations·filing 2002–2007
74Inventor score
Files withSONY CORP4
Top patents by PatentIndex Score
4 records- 0174US7369213B2Exposure method using complementary divided mask, exposure apparatus, semiconductor device, and method of producing the sameSONY CORP·Filed 2007·Granted May 6, 2008·4 cites·1 claims
- 0267US7160655B2Exposure method using complementary divided mask, exposure apparatus, semiconductor device, and method of producing the sameSONY CORP·Filed 2005·Granted Jan 9, 2007·2 cites·5 claims
- 0367US6916582B2Mask for fabrication of semiconductor devices, process for production of the same, and process for fabrication of semiconductor devicesSONY CORP·Filed 2002·Granted Jul 12, 2005·9 cites·12 claims
- 0465US6969571B2Exposure method using complementary divided mask, exposure apparatus, semiconductor device, and method of producing the sameSONY CORP·Filed 2002·Granted Nov 29, 2005·9 cites·11 claims
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