Inventor · disambiguated record
Muharrem Bayraktar
Also filed as: BAYRAKTAR MUHARREM
2 granted patents·1 pending application·4 citations·filing 2013–2017
48Inventor score
Top patents by PatentIndex Score
3 records- 0171US9997268B2EUV-mirror, optical system with EUV-mirror and associated operating methodZEISS CARL SMT GMBH·Filed 2016·Granted Jun 12, 2018·1 cites·22 claims
- 0271US9442383B2EUV-mirror arrangement, optical system with EUV-mirror arrangement and associated operating methodZEISS CARL SMT GMBH·Filed 2013·Granted Sep 13, 2016·3 cites·25 claims
- 0334US2019271586A1Method, apparatus and computer program for measuring and processing a spectrum of an xuv light source from soft x-rays to infrared wavelengthUNIV TWENTE·Filed 2017·Application pending·0 cites
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