Inventor · disambiguated record
Frank Hillmann
Also filed as: HILLMANN FRANK
1 granted patent·2 pending applications·0 citations·filing 2004–2005
10Inventor score
Technology areasG02B
Top patents by PatentIndex Score
3 records- 0130US7375792B2Apparatus for measuring feature widths on masks for the semiconductor industryLEICA MICROSYSTEMS·Filed 2004·Granted May 20, 2008·0 cites·22 claims
- 0227US2008259327A1Device for Inspecting a Microscopic ComponentVISTEC SEMICONDUCTOR SYS GMBH·Filed 2005·Application pending·0 cites
- 0327US2007206279A1Device for inspecting a microscopic component by means of an immersion objectiveVISTEC SEMICONDUCTOR SYS GMBH·Filed 2005·Application pending·0 cites
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