Inventor · disambiguated record
Raymond F. Cybulski
Also filed as: CYBULSKI RAYMOND · CYBULSKI RAYMOND F
10 granted patents·167 citations·filing 1998–2005
90Inventor score
Files withCYMER INC10
Top patents by PatentIndex Score
10 records- 0191US6795474B2Gas discharge laser with improved beam pathCYMER INC·Filed 2001·Granted Sep 21, 2004·46 cites·26 claims
- 0286US6882674B2Four KHz gas discharge laser systemCYMER INC·Filed 2001·Granted Apr 19, 2005·31 cites·66 claims
- 0386US6496528B2Line narrowing unit with flexural grating mountCYMER INC·Filed 2001·Granted Dec 17, 2002·31 cites·17 claims
- 0483US6778584B1High power gas discharge laser with helium purged line narrowing unitCYMER INC·Filed 2000·Granted Aug 17, 2004·17 cites·12 claims
- 0571US8379687B2Gas discharge laser line narrowing moduleCYMER INC·Filed 2005·Granted Feb 19, 2013·4 cites·8 claims
- 0666US7277466B2High power gas discharge laser with helium purged line narrowing unitCYMER INC·Filed 2004·Granted Oct 2, 2007·7 cites·35 claims
- 0765US6839372B2Gas discharge ultraviolet laser with enclosed beam path with added oxidizerCYMER INC·Filed 2002·Granted Jan 4, 2005·8 cites·28 claims
- 0864US7346093B2DUV light source optical element improvementsCYMER INC·Filed 2004·Granted Mar 18, 2008·8 cites·46 claims
- 0950US6396582B1Wavelength reference for laserCYMER INC·Filed 1998·Granted May 28, 2002·10 cites·47 claims
- 1032US6735236B2High power gas discharge laser with line narrowing unitCYMER INC·Filed 1999·Granted May 11, 2004·5 cites·18 claims
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