Inventor · disambiguated record
A. Stuart Denholm
Also filed as: DENHOLM A S · DENHOLM A STUART · DENHOLM ALEC STUART
11 granted patents·1,035 citations·filing 1981–1999
94Inventor score
Top patents by PatentIndex Score
11 records- 0196US4382186AProcess and apparatus for converged fine line electron beam treatment of objectsENERGY SCIENCES INC·Filed 1981·Granted May 3, 1983·89 cites·37 claims
- 0295US6237527B1System for improving energy purity and implant consistency, and for minimizing charge accumulation of an implanted substrateAXCELIS TECH INC·Filed 1999·Granted May 29, 2001·281 cites·6 claims
- 0394US6101971AIon implantation control using charge collection, optical emission spectroscopy and mass analysisAXCELIS TECH INC·Filed 1998·Granted Aug 15, 2000·142 cites·7 claims
- 0491US6050218ADosimetry cup charge collection in plasma immersion ion implantationEATON CORP·Filed 1998·Granted Apr 18, 2000·114 cites·17 claims
- 0591US5654043APulsed plate plasma implantation system and methodEATON CORP·Filed 1996·Granted Aug 5, 1997·124 cites·21 claims
- 0688US5911832APlasma immersion implantation with pulsed anodeEATON CORP·Filed 1997·Granted Jun 15, 1999·117 cites·12 claims
- 0784US4667111AAccelerator for ion implantationEATON CORP·Filed 1985·Granted May 19, 1987·78 cites·17 claims
- 0875US5134299AIon beam implantation method and apparatus for particulate controlEATON CORP·Filed 1991·Granted Jul 28, 1992·29 cites·13 claims
- 0973US4446373AProcess and apparatus for converged fine line electron beam treatment objectsSONY CORP·Filed 1983·Granted May 1, 1984·16 cites·34 claims
- 1071US4528208AMethod and apparatus for controlling article temperature during treatment in vacuumZYMET INC·Filed 1983·Granted Jul 9, 1985·21 cites·25 claims
- 1167US6180954B1Dual-walled exhaust tubing for vacuum pumpEATON CORP·Filed 1997·Granted Jan 30, 2001·24 cites·12 claims
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