Inventor · disambiguated record

Shoyo Fujita

Also filed as: FUJITA SHOYO

1 granted patent·168 citations·filing 1989–1989

55Inventor score

Technology areasC23C

Files withHITACHI LTD1

Top patents by PatentIndex Score

1 record

0195US4963239ASputtering process and an apparatus for carrying out the sameHITACHI LTD·Filed 1989·Granted Oct 16, 1990·168 cites·22 claims

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